China's independently developed DUV lithography machine has started mass production, and manufacturers such as Changxin Storage may be the first customers

According to sources cited by The Information, a company supported by Chinese state-owned capital has started mass producing independently developed DUV lithography machines, with plans to produce about 5 units in 2026 and about 20 units in 2027. ASML delivered 131 sets of immersion DUV lithography systems last year. This batch of domestically produced DUV lithography machines is planned to be delivered to SMIC, Huahong Semiconductor, and Changxin Storage, among which Changxin Storage is expected to become an important application of domestically advanced semiconductor manufacturing equipment.